[labnetwork] Vendors for AZ 5214IR resist?

[Greg Allion]

I'll second that statement.  We've been much happier with the nLOF 2000
series.  NH3 is always great, but time consuming.
The 2000 series is still a bit touchy, the calibration of the hotplate
matters, but sidewall slope is very controllable and can be optically
confirmed fairly easily with the thicker materials.  Not as easily as LOR,
but obvious enough to be able to train beginners.
I've gotten the impression that there's something magical about 5214 though
when choosing a resist as a carbon cap for high temp annealing of SiC, but
I don't know if that's just voodoo.  Very limited personal experience here.
Thanks,
Greg

On Tue, Jan 7, 2025 at 4:04 PM Garry J. Bordonaro <bordonaro at cnf.cornell.edu>
wrote:

> I should also mention that the IR capabilities of 5214 are marginal and
> deteriorate with time.  We use AZ nLOF2020 for IR applications, or a NH3
> process.
>
>
>
>
>
> Garry J. Bordonaro
>
> Microlithographic Engineer
>
> Cornell NanoScale Facility
>
> 250 Duffield Hall
>
> 343 Campus Road
>
> Ithaca NY 14853-2700
>
> (607) 254-4936
>
> bordonaro at cnf.cornell.edu
>
> http://www.cnf.cornell.edu/
>
>
>
> Please acknowledge CNF in your publications:
>
> "This work was performed in part at the Cornell NanoScale Science &
> Technology Facility (CNF), a member of the National Nanotechnology
> Coordinated Infrastructure (NNCI), which is supported by the National
> Science Foundation (Grant NNCI-2025233)."
>
>
>
>
>
>
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Jeff
> Salzmann
> *Sent:* Tuesday, January 7, 2025 10:34 AM
> *To:* Fab Network <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Vendors for AZ 5214IR resist?
>
>
>
> Hope you can save me some frustrations here- I’m looking to source a
> vendor that sells AZ 5214IR resist. Any recommendations?
>
>
>
> Thanks!!!
>
> Jeff
>
>
>
> Jeff Salzmann
>
> Assistant Professor of Research
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo
>
> 114A Davis Hall
>
> Buffalo, NY 14260
>
> Tel: 716.645.2584
>
>
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-- 
Greg Allion
NC State University Nanofabrication Facility (NNF)
Process Integration Engineering Manager

Monteith Research Center
2410 Campus Shore Drive rm.243C
Raleigh, NC 27606
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