[labnetwork] Vendors for AZ 5214IR resist?
Garry J. Bordonaro
bordonaro at cnf.cornell.edu
Tue Jan 7 16:21:08 EST 2025
AZ nLOF works very well for us. Easy to get and use.
Garry J. Bordonaro
Microlithographic Engineer
Cornell NanoScale Facility
250 Duffield Hall
343 Campus Road
Ithaca NY 14853-2700
(607) 254-4936
bordonaro at cnf.cornell.edu <mailto:bordonaro at cnf.cornell.edu>
http://www.cnf.cornell.edu/
Please acknowledge CNF in your publications:
"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Yakimov,
Michael
Sent: Tuesday, January 7, 2025 1:26 PM
To: Jeff Salzmann <jks7 at buffalo.edu>; Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Vendors for AZ 5214IR resist?
Last time I looked at it - https://www.microchemicals.com/NEWS/
>The manufacturer Merck informed us that production of the AZ R 5214 E will
be discontinued by the end of 2021(PCN
<https://www.microchemicals.com/media/08/6c/bb/1710258928/PCN_Letter_AZ_5214
E_phase_out_20201209.pdf> ). We have also been informed that a similar (but
not identical) product is already on the market: the Japanese version of the
AZ
<https://www.microchemicals.com/AZ-5214-E-Photoresist-3.785-l/1005214EJP> R
5214E.
There is a message in the same communication batch saying Shizuoka (JP) is
manufacturing their version, but my impression (would be happy to be proven
wrong) is that they don't really care about US sales.
Again, I would be happy to hear otherwise - but looks like switching to LOR
is the best strategy long term. NH3 image reversal can be an emergency plan
B
Thanks
mike
_______________________________________________
Michael Yakimov
Research scientist
Department of Nanoscale Science and Engineering
University at Albany - State University of NY
253 Fuller rd.
Albany NY 12203
Phone: 518-437-8609 lab
e-mail: myakimov at albany.edu <mailto:myakimov at albany.edu>
_____
From: labnetwork <labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> > on behalf of Jeff Salzmann
<jks7 at buffalo.edu <mailto:jks7 at buffalo.edu> >
Sent: Tuesday, January 7, 2025 10:34 AM
To: Fab Network <labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> >
Subject: [labnetwork] Vendors for AZ 5214IR resist?
Hope you can save me some frustrations here- I'm looking to source a vendor
that sells AZ 5214IR resist. Any recommendations?
Thanks!!!
Jeff
Jeff Salzmann
Assistant Professor of Research
Cleanroom Manager, Shared Instrumentation Laboratories
School of Engineering and Applied Sciences
University at Buffalo
114A Davis Hall
Buffalo, NY 14260
Tel: 716.645.2584
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