[labnetwork] Vendors for AZ 5214IR resist?

Garry J. Bordonaro bordonaro at cnf.cornell.edu
Tue Jan 7 16:21:08 EST 2025


AZ nLOF works very well for us.  Easy to get and use.

 

 

Garry J. Bordonaro

Microlithographic Engineer

Cornell NanoScale Facility

250 Duffield Hall

343 Campus Road

Ithaca NY 14853-2700

(607) 254-4936

bordonaro at cnf.cornell.edu <mailto:bordonaro at cnf.cornell.edu> 

http://www.cnf.cornell.edu/

 

Please acknowledge CNF in your publications:

"This work was performed in part at the Cornell NanoScale Science &
Technology Facility (CNF), a member of the National Nanotechnology
Coordinated Infrastructure (NNCI), which is supported by the National
Science Foundation (Grant NNCI-2025233)."

 

 

 

 

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Yakimov,
Michael
Sent: Tuesday, January 7, 2025 1:26 PM
To: Jeff Salzmann <jks7 at buffalo.edu>; Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Vendors for AZ 5214IR resist?

 

Last time I looked at it - https://www.microchemicals.com/NEWS/

 

 >The manufacturer Merck informed us that production of the AZ R 5214 E will
be discontinued by the end of 2021(PCN
<https://www.microchemicals.com/media/08/6c/bb/1710258928/PCN_Letter_AZ_5214
E_phase_out_20201209.pdf> ). We have also been informed that a similar (but
not identical) product is already on the market: the Japanese version of the
AZ
<https://www.microchemicals.com/AZ-5214-E-Photoresist-3.785-l/1005214EJP> R
5214E.

 

There is a message in the same communication batch saying Shizuoka (JP) is
manufacturing their version, but my impression (would be happy to be proven
wrong)  is that they don't really care about US sales.

 

Again, I would be happy to hear otherwise - but looks like switching to LOR
is the best strategy long term. NH3 image reversal can be an emergency  plan
B

 

 

Thanks

 

mike

 

 

 

 

 

_______________________________________________

Michael Yakimov

Research scientist

Department  of Nanoscale Science and Engineering

University at Albany - State University of NY

 

253 Fuller rd.

Albany NY 12203

 

Phone: 518-437-8609 lab

e-mail: myakimov at albany.edu <mailto:myakimov at albany.edu> 

 

  _____  

From: labnetwork <labnetwork-bounces at mtl.mit.edu
<mailto:labnetwork-bounces at mtl.mit.edu> > on behalf of Jeff Salzmann
<jks7 at buffalo.edu <mailto:jks7 at buffalo.edu> >
Sent: Tuesday, January 7, 2025 10:34 AM
To: Fab Network <labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> >
Subject: [labnetwork] Vendors for AZ 5214IR resist? 

 

Hope you can save me some frustrations here- I'm looking to source a vendor
that sells AZ 5214IR resist. Any recommendations?

 

Thanks!!!

Jeff

 

Jeff Salzmann

Assistant Professor of Research

Cleanroom Manager, Shared Instrumentation Laboratories

School of Engineering and Applied Sciences

University at Buffalo

114A Davis Hall

Buffalo, NY 14260

Tel: 716.645.2584

 

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