[labnetwork] Vendors for AZ 5214IR resist?

[Demis D. John]

We get AZ 5214-EIR (I assume the “E” means that’s the new Japanese
formulation) from Integrated Micro Materials. Here is the part number:
AZ5214EIR-1Q INTEGRATED MICRO MATERIALS

As far as I know we didn’t see any problem when the formulation changed in
~2021.
It still works as both positive and negative PR.

-- Demis (contact info <https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>)
*Reminder*: The NanoFab has a publications policy
<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>


On Wed, Jan 8, 2025 at 05:46 Garry J. Bordonaro <bordonaro at cnf.cornell.edu>
wrote:

> AZ nLOF works very well for us.  Easy to get and use.
>
>
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>
> Garry J. Bordonaro
>
> Microlithographic Engineer
>
> Cornell NanoScale Facility
>
> 250 Duffield Hall
>
> 343 Campus Road
> <https://www.google.com/maps/search/343+Campus+Road+Ithaca+NY+14853-2700?entry=gmail&source=g>
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> Ithaca NY 14853-2700
> <https://www.google.com/maps/search/343+Campus+Road+Ithaca+NY+14853-2700?entry=gmail&source=g>
>
> (607) 254-4936
>
> bordonaro at cnf.cornell.edu
>
> http://www.cnf.cornell.edu/
>
>
>
> Please acknowledge CNF in your publications:
>
> "This work was performed in part at the Cornell NanoScale Science &
> Technology Facility (CNF), a member of the National Nanotechnology
> Coordinated Infrastructure (NNCI), which is supported by the National
> Science Foundation (Grant NNCI-2025233)."
>
>
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>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Yakimov,
> Michael
> *Sent:* Tuesday, January 7, 2025 1:26 PM
> *To:* Jeff Salzmann <jks7 at buffalo.edu>; Fab Network <
> labnetwork at mtl.mit.edu>
> *Subject:* Re: [labnetwork] Vendors for AZ 5214IR resist?
>
>
>
> Last time I looked at it - https://www.microchemicals.com/NEWS/
>
>
>
> * >The manufacturer Merck informed us that production of the AZ ® 5214 E
> will be discontinued by the end of 2021(PCN
> <https://www.microchemicals.com/media/08/6c/bb/1710258928/PCN_Letter_AZ_5214E_phase_out_20201209.pdf>).
> We have also been informed that a similar (but not identical) product is
> already on the market: the Japanese version of the AZ ® 5214E
> <https://www.microchemicals.com/AZ-5214-E-Photoresist-3.785-l/1005214EJP>.*
>
>
>
> There is a message in the same communication batch saying Shizuoka (JP) is
> manufacturing their version, but my impression (would be happy to be proven
> wrong)  is that they don't really care about US sales.
>
>
>
> Again, I would be happy to hear otherwise - but looks like switching to
> LOR is the best strategy long term. NH3 image reversal can be an emergency
> plan B
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>
>
>
> Thanks
>
>
>
> mike
>
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>
>
> _______________________________________________
>
> Michael Yakimov
>
> Research scientist
>
> Department  of Nanoscale Science and Engineering
>
> University at Albany - State University of NY
> <https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g>
>
>
>
> 253 Fuller rd.
> <https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g>
>
> Albany NY 12203
> <https://www.google.com/maps/search/NY+253+Fuller+rd.+Albany+NY+12203?entry=gmail&source=g>
>
>
>
> Phone: 518-437-8609 lab
>
> e-mail: myakimov at albany.edu
>
>
> ------------------------------
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Jeff
> Salzmann <jks7 at buffalo.edu>
> *Sent:* Tuesday, January 7, 2025 10:34 AM
> *To:* Fab Network <labnetwork at mtl.mit.edu>
> *Subject:* [labnetwork] Vendors for AZ 5214IR resist?
>
>
>
> Hope you can save me some frustrations here- I’m looking to source a
> vendor that sells AZ 5214IR resist. Any recommendations?
>
>
>
> Thanks!!!
>
> Jeff
>
>
>
> Jeff Salzmann
>
> Assistant Professor of Research
>
> Cleanroom Manager, Shared Instrumentation Laboratories
>
> School of Engineering and Applied Sciences
>
> University at Buffalo
>
> 114A Davis Hall
>
> Buffalo, NY 14260
>
> Tel: 716.645.2584
>
>
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