[labnetwork] Savanah 100 TiCl4

[Gohmyeong Bae]

Dear Lab network,

I am afraid of using TiCl4 precursor in our fab, we had old Savanah 100 system with foreline trap and vacuum pump.

Main canister box is exhausted and pump outlet also in the exhaust line.

On this circumstances, is it safe to use TiCl4 canister for this system?

Thank you.

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