[labnetwork] Local cooling of large rough pumps

Fri Jan 17 12:15:47 EST 2025

If your facility has a chilled water loop you have the option of going to water/water chiller vs Air/water. The Water/Water chiller are quiet and efficient.

Deon D. Collins

Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Richelson, Tucson
Sent: Friday, January 17, 2025 10:16 AM
To: Nicholas Menounos <menounos at mit.edu>; Samantha Roberts <sroberts at gc.cuny.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Local cooling of large rough pumps

Hello Samantha,

We use local chillers for two of our Oxford PlasmaPro100's (and associate rough pumps). I have a TF7500, and a dinosaur Lyrton RC070. I look at the gpm and everything else usually scales with it. The chillers are noisy and it's a little messy with the additional hoses and pipes, but it's worth it.
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> on behalf of Nicholas Menounos <menounos at mit.edu<mailto:menounos at mit.edu>>
Sent: Sunday, December 29, 2024 08:47
To: Samantha Roberts <sroberts at gc.cuny.edu<mailto:sroberts at gc.cuny.edu>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: Re: [labnetwork] Local cooling of large rough pumps

Early days of MIT.nano, while the central PCW distribution was being replaced, we installed a half dozen air cooled Thermo TF7500 chillers up on the fan deck to serve groups of tools (essentially a mini chiller system). They can cool up to 7.5kW @ 20GPM/~60F supply…We filled with RO water, and it worked well for us > 2 years.

Happy to discuss in detail if you have questions email/call me.

Nicholas Menounos, PE, LEED AP

Associate Director of Infrastructure

MIT.nano

Massachusetts Institute of Technology

77 Massachusetts Ave, Bldg 12-5007

Cambridge, MA 02139

Cell: (508) 932-0938<tel:+15089320938>

Office: (617) 253-7234<tel:+16172537234>

Email: Menounos at mit.edu<mailto:Menounos at mit.edu>

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Samantha Roberts
Sent: Thursday, December 26, 2024 1:15 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Local cooling of large rough pumps

Hello Labnetwork --

I hope you have had been having a good holiday!

I have a situation where our main facility chiller is offline and for reason beyond our control may be offline for some time.  We do not have a facility-scale backup chiller 🙁.

Has anyone implemented local cooling solutions for their plasma tool rough pumps?

One idea might be to have several individual smaller air cooled SMC-HRS-050 type chillers<https://urldefense.com/v3/__https:/www.smcelectric.com/products/smc-spnhrs050an20/?srsltid=AfmBOooeEziJMZnHJXZuusTW5CAROr0mVf6TMwfapY0K72tJPtqaUb_o__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX5--uC7w$> (or the like) each cooling a single Pfeiffer pump (Such as is used for ICPs and PECVD pumps).

However, I am not certain of what the critical values are to be satisfied, and how to determine if this is even feasible.  I am currently looking at the water temperature and flow requirements for the pump at the moment, but do not know if these are the only considerations.

If anyone has implemented individual cooling solution for pumps the size of Pfeiffer pumps A604<https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$> <https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a604h-multi-stage-dry-process-pump?srsltid=AfmBOopKTRPXlmYwryqgyYq73UzqL-WHyLesP6H1sfMHLEvarD3C99H7__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTXanMidzA$> or A124<https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$> <https://urldefense.com/v3/__https:/www.provac.com/products/pfeiffer-a124h-multi-stage-dry-process-pump?srsltid=AfmBOooZkIRhCvwgFPkQMOK-1UhZbuHR1HPP9W5s0JgltU5ghsW-I4Je__;!!DZ3fjg!7-b6vN-wvHznfwGYzYfmvQ6CO6zD3rhN8uTxJbiwX7sHM5ZKwNn0hmlCKtMd_y7ebf1p7pG3EJTX2KvhcyQ$> I would love to hear what specific chillers you have used and what your experience of this has been.

Thanks – and happy new year!

Best
Sam

____________________________________

Samantha Roberts PhD

ASRC Nanofabrication Facility Director

City University of New York

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