[labnetwork] Spare/Repair MKS Spectrum B-3013/ B-1513 RF Generator for Plasma tools?

[Nathan Aultman]

Hello Rohit,

I would recommend you reach out to https://www.odysseyrf.com/, and inquire if they can repair your generators.  They have repaired a couple older generators for us.

Best regards,

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Khanna, Rohit
Sent: Friday, January 17, 2025 12:49 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Spare/Repair MKS Spectrum B-3013/ B-1513 RF Generator for Plasma tools?

Dear All,
                  We are looking for a MKS Spectrum B-3013 RF Generator or MKS  Spectrum B-1513 RF Generator for one of our plasma tool. Our existing 13.56 MHz RF generator has failed and attempts to get it repaired from MKS and RF global has been unsuccessful, as these units are obsolete and no longer serviceable. If anyone has spare unit of these particular RF generators and wishes to sell or give them away we would be happy to purchase them if they are in working condition.


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Warm Regards
Rohit Khanna
Electronic Test & Measurement Engineer
London Centre for NANO Technology, UCL
Ph:+44-020-76799984
Lab: +44 20 3108 1516
Int Ext: 39984

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