[labnetwork] ALD bubbler refill on site

Martin, Michael michael.martin at louisville.edu
Fri Jan 17 14:25:53 EST 2025


Hey gang,
   We just happen to have a very nice glove box available to us and were considering refilling our TMA precursor ourselves.  Our bubler is a DOT version.  I was wondering if anyone does this themselves and would be willing to share some pointers or an SOP?  It looks like Sigma will ship in their Sure/Pac cylinder system.  Does anyone have experience with this?  It looks like I would not even have to use a glove box.

 https://www.sigmaaldrich.com/deepweb/assets/sigmaaldrich/product/documents/393/908/al_techbull_al136.pdf


Regards,

   Michael Martin, Ph.D.


Engineering Senior Researcher

Micro/Nano Technology Center

University of Louisville

(502) 552-1945

Web page<https://louisville.edu/micronano> Instagram<https://www.instagram.com/micronanolouisville/> Facebook<https://www.facebook.com/MNTCUOFL/> YouTube<https://www.youtube.com/channel/UCGiczmq6wVIBJlM7UEGVW9Q> TikTok<https://www.tiktok.com/@micronanolouisville?is_from_webapp=1&sender_device=pc>

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