[labnetwork] BST deposition question

[Robert Vandusen]

Hi again kabnetwork.
I just wanted to check-in again to see if anyone has any BST (Barium Strontium Titanate) deposition capability or advice on depositing this material.

Thanks in advance.
Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761  Cell 613-791-5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

From: Robert Vandusen
Sent: January 18, 2025 11:39 AM
To: labnetwork at mtl.mit.edu
Subject: BST deposition question

Hello colleagues.
We have a researcher inquiring about BST sputter deposition.  Their reference process requires deposition @ 400 deg C 20mtorr Ar/O2 gas pressure.
Our sputter system does not have heating above ~ 150 deg C at < 15mtorr.  Just wondering if anyone out there has a Low temperature/pressure BST sputtering or evaporation process.

Alternatively I would be curious to know if anyone can run BST depositions as a fee for service.

Thanks
Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761  Cell 613-791-5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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