[labnetwork] BST deposition question

[Robert Vandusen]

Hello colleagues.
We have a researcher inquiring about BST sputter deposition.  Their reference process requires deposition @ 400 deg C 20mtorr Ar/O2 gas pressure.
Our sputter system does not have heating above ~ 150 deg C at < 15mtorr.  Just wondering if anyone out there has a Low temperature/pressure BST sputtering or evaporation process.
Alternatively I would be curious to know if anyone can run BST depositions as a fee for service.

Thanks
Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761  Cell 613-791-5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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