[labnetwork] H2 annealing system for small research

[Gohmyeong Bae]

Dear Lab network,

Can I get some vendor information for the H2 annealing system for cleaning surface of Silicon wafer?

We had searched some of vendors but lack of knowledge in this types of machine.

Thank you.

Best,
Gohmyeong Bae.

Gohmyeong Bae, M. S.
He/Him/His
Institute of Applied Life Science (IALS)
Cleanroom Facility Manager for Nano and Device Fabrication Cleanroom
Conte building B111, Marcus Hall 25
Amherst, MA 01003
413-472-1570
gohmyeongbae at umass.edu

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