[labnetwork] 200 mm HDP/ICP CVD tool?

[Russ Renzas]

I have a corporate user in the Bay Area looking for an academic facility with a 200 mm ICP CVD/HDP CVD tool for a gap fill application, filling with SiO2.

Does anybody offer this? He's specifically interested in academic facilities. 200 mm is a must because the wafers will have other processes done at their foundry partners.

Russ

Russ Renzas, Ph.D.
Director, Davidson Foundation Cleanroom, College of Engineering
Research Associate Professor, Electrical Engineering
University of Nevada, Reno
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