[labnetwork] 200 mm HDP/ICP CVD tool?

[Christopher Alpha]

Hi Russ,


We have a Plasma Therm Takachi HDP CVD with 100, 150 and 200mm hardware.


PM Jeremy, Mike and I and we can talk about possibilities, its usually 
configured for 100mm but it can be changed up on demand.


Best,
Chris



On 7/2/25 13:47, Russ Renzas wrote:
> I have a corporate user in the Bay Area looking for an academic 
> facility with a 200 mm ICP CVD/HDP CVD tool for a gap fill 
> application, filling with SiO2.
>
> Does anybody offer this? He's specifically interested in academic 
> facilities. 200 mm is a must because the wafers will have other 
> processes done at their foundry partners.
>
> Russ
>
> Russ Renzas, Ph.D.
> Director, Davidson Foundation Cleanroom, College of Engineering
> Research Associate Professor, Electrical Engineering
> University of Nevada, Reno
>
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-- 
Christopher Alpha
User Program Manager
Cornell Nanoscale Facility
Cornell University
250 Duffield Hall
343 Campus Rd
Ithaca, NY 14853
tel (607)254-4913

Any email from me will always really be from me without any AI "assistance"
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