[labnetwork] Advice on cleanroom access

[Lowell, Peter J. (Fed)]

Hi Everyone,

We have a request for a new cleanroom user who requires the use of a wheelchair and looking to process wafers including tool and wetbench use.  We are working with our safety department on this request, and we were wondering if anyone has any experience with this in one of their cleanrooms and would be willing to share best practices?

Thanks a bunch in advance for your help!

Peter

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Peter Lowell, Ph.D.
Physicist
Boulder Micro-Fabrication Facility
National Institute of Standards and Technology
325 Broadway MS 680.09
Boulder, CO 80305
Phone: (303) 497-6934

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