[labnetwork] gas abatement question

[Dennis Schweiger]

Nathaniel,

Good morning.  Here at UofMichigan, we've been doing just that since 2010
with several tools (running them into a single POU abatement system) with
no issues.  You have to remember that your POU scrubbers will be
upstream of your exhaust fans, and that will keep the abatement negative
relative to what's feeding in upstream of them.  As long as you size them
for the capacity of your tools, you shouldn't have any issues.

Our units are an Airguard Cyclone Fume Scrubber, and a Pure Air Systems
S.DOC series.

Dennis Schweiger
Facilities
University of Michigan/LNF

734.647.2055 Ofc


On Fri, Jul 11, 2025 at 7:39 AM Nathanael Sieb <sieb at 4dlabs.ca> wrote:

> Hi all,
>
> We are working on installing a new VHF system and a PECVD in our lab.  We
> are looking at dry scrubbers for the gas abatement.  One question is
> whether we purchase one larger system for both tools or get a smaller one
> for each tool.  Has anyone manifolded two separate tools into one abatement
> scrubber?
>
> I have 2 main concerns:
>
> - waste gas from one operating tool back-flowing into the other shut-down
> tool
>
> - 'using up' the neutralizing capacity for one tool before the other
> (i.e., heavier than expected usage on one tool resulting in a need to
> change the canister even though the other tool can be neutralized fine)
>
> I would appreciate any feedback folks could offer!
>
> Also, if you have any opinions on potential systems, please feel free to
> reach out to me directly.
>
> Thanks,
>
> Nathanael
>
> * Nathanael Sieb *
> Director of Operations and Administration  |  4D LABS
> <http://www.4dlabs.ca/>
> Simon Fraser University
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