[labnetwork] gas abatement question

[Nicholas Menounos]

Hi Nathanael,

We have 3 dry bed systems; 2 have more than 1 tool going to them. It’s generally considered bad practice in industry, but given R&D flow rates and utilization we felt the benefits far outweighed the cons.

Prior to installing in this configuration, we conducted a formal risk assessment (e.g. FMEA) and included all of the process conditions in our RFP, to ensure vendor alignment/acceptance of the methodology.

It’s a much longer discussion to review all the safety implications (material compatibility, flow rates, failure modes etc)…But the heavy hitters: redundant exhaust monitoring (TGMS and local – no potential for backflow), breakthrough/temperature monitoring, service contract support, remote system status monitoring and an integrated bypass canister.

Best,
Nicholas Menounos, PE, LEED AP
Associate Director of Infrastructure

MIT.nano
Massachusetts Institute of Technology
77 Massachusetts Ave, Bldg 12-5007
Cambridge, MA 02139
Cell: (508) 932-0938<tel:+15089320938>
Office: (617) 253-7234<tel:+16172537234>
Email: Menounos at mit.edu<mailto:Menounos at mit.edu>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Nathanael Sieb
Sent: Thursday, July 10, 2025 8:17 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] gas abatement question


Hi all,

We are working on installing a new VHF system and a PECVD in our lab.  We are looking at dry scrubbers for the gas abatement.  One question is whether we purchase one larger system for both tools or get a smaller one for each tool.  Has anyone manifolded two separate tools into one abatement scrubber?

I have 2 main concerns:

- waste gas from one operating tool back-flowing into the other shut-down tool

- 'using up' the neutralizing capacity for one tool before the other (i.e., heavier than expected usage on one tool resulting in a need to change the canister even though the other tool can be neutralized fine)

I would appreciate any feedback folks could offer!

Also, if you have any opinions on potential systems, please feel free to reach out to me directly.

Thanks,

Nathanael

Nathanael Sieb
Director of Operations and Administration  |  4D LABS<http://www.4dlabs.ca/>
Simon Fraser University
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