[labnetwork] Disposal of some surplus equipment

[Aamer Mahmood]

Dear colleagues,
We have a couple of systems we are looking to remove from our cleanroom. We are open to selling these. All reasonable offers from interested partied will be considered.
Please contact me directly at aamer at uchicago.edu<mailto:aamer at uchicago.edu> if you are interested.



  1.  Horiba UVISEL2 Spectroscopic Ellipsometer (System does not work but can be used for parts)

  *   Wavelength range: 190nm - 2100nm
  *   Automated variable angle from 35deg to 90deg
  *   Automated stage, 200mm x 200mm x 35mm
  *   Spot size 35um x 85um up to 705um x 2030um
  *   Imaging camera for spot placement
  *   Capable of Mueller Matrix measurement
  *   Uses a photoelastic modulator for polarization

     *   Currently the IR spectrum doesn’t work
     *   The goniometers sometimes freeze
     *   And we haven’t been able to align the beam because something is probably misaligned in the optics.


  1.  3C Technical GCA AutoStep 200 5x Reduction Stepper (System works and was maintained by a service contract, but is currently powered off)

  *   The GCA AutoStep 200 Stepper is an I-line 5x reduction stepper with repeat exposure capabilities. It is capable of submicron resolution and high accuracy alignment.
  *   21 mm dia exposure field (up to 14.8 X 14.8 mm square)
  *   Can achieve resolution < 600 nm
  *   200 mm wafer stage
  *   Stage precision < 100 nm
  *   Accommodates wafer sizes from 1 cm pieces to 6” wafers
  *   Automatic reticle transfer alignment through RMS (reticle management system)
  *   Exposure wavelength of 365 nm

Thanks,

--
Aamer Mahmood

Executive Director
Pritzker Nanofabrication Facility
William Eckhardt Research Center
University of Chicago
5640 S. Ellis Ave., Chicago, IL 60637

Tel: +1 (773) 702 8903
Web: pnf.uchicago.edu
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