[labnetwork] Gas cabinet installation by contractors or facility

[Iulian Codreanu]

Hi Joe,

In the two cleanrooms I helped build there was a clear separation 
between Base Build and Tool Install (separate projects). For all four 
projects we hired design and construction teams. I had it done both 
ways; in the first one the gas equipment (gas cabinets and VMBs) was 
installed during the Base Build and in the second during the Tool Install.

During the design phase of each Base Build I developed a pretty good 
idea of what the tool set would be (which helped develop the Utility 
Matrix) and where they would be located (which drove the Cleanroom 
Layout). Of course, the final set was not exactly what I had envisioned 
but it came close.

If I had to do it again I would probably lean towards installing the gas 
equipment during the Tool Install, by professionals. One of the reasons 
is that by then the tool set would be better defined. During the Base 
Build I would make sure that I would size the support systems (e.g. 
exhaust, power, N2, fire suppression) adequately based on a very 
educated guess of the tool set. I would also have the required utility 
"taps" provided during the Base Build. Also during Base Build, I would 
want to put in place a TGMS with a robust "backbone" to support the 
needs of the tools and gas equipment.

Cheers!

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 3/4/2025 12:39 PM, Joseph Losby wrote:
> Dear Labnetwork,
>
> We are currently in the design development phase of constructing a 
> cleanroom facility.  The intention is to have about 40-50% of the 
> cleanroom unused on opening day that is reserved for future tools.  
> Although we have scoped out what future equipment we wish to acquire, 
> they are not finalized.
>
> Our contractors wish to install the gas cabinets (they are included in 
> the project budget) for both the currently scoped and future tools.  
> Because the cabinet configurations are equipment dependent (most will 
> be for RIE and CVD/dep tools), we are trying to decide if it's worth 
> the contractors installing 'generic' cabinets for future tools that we 
> can configure ourselves (install gas monitoring, safety showers, etc).
>
> Do you feel this is a feasible approach and if so, what would you 
> install? Or, would you rather install the cabinets yourselves entirely?
>
> Cheers,
> Joe
>
>
>
> *Joseph Losby, PhD*
>
> *Manager, qLab Operations*
>
> *joseph.losby at ucalgary.ca*
>
>
> <https://io.ucalgary.ca/quantum-city>
>
> *_
> _*
>
>
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