[labnetwork] EBL Staffing and Support

[Nathan Aultman]

Good morning Brian,

At the UCF CREOL, we just purchased a new Raith EBL as a swap for our older Leica system.  We have an annual service contract which is about $146k.  This is spendy but probably worth it given how important the system is to faculty.  A faculty member is FPOC for this tool and would administer initial training although that may change.  Cleanroom staff do not currently participate in service for the tool.  We did purchase a Lindgren field cancellation system.  I cannot say yet if it was worth it.

Best regards,

Nathan C. Aultman
University of Central Florida
407-823-6852
naultman at creol.ucf.edu<mailto:naultman at creol.ucf.edu>



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Brian Baker
Sent: Wednesday, March 5, 2025 2:24 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] EBL Staffing and Support

Dear Lab Network,

We are in the process of purchasing our first electron beam lithography (EBL) system, and we are reaching out to understand how different facilities staff and support their EBL tools.

For those of you who have an EBL system, we would appreciate any insights you can share regarding staffing:

  *   Do you have a dedicated staff member for EBL operations?
  *   If not, what percentage FTE is typically required to maintain the tool, develop processes, train users, and run jobs?
  *   Any additional insights on challenges or best practices for supporting an EBL system?


Your feedback would be incredibly valuable as we establish a sustainable support model for our system.

Thank you for your time and insights,

Brian Baker
University of Utah Nanofab Cleanroom Manager


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