[labnetwork] EBL Staffing and Support

[Iulian Codreanu]

Hi Brian,

We focus on training the users to be independent on the e-beam writer 
and assist them when they run into issues. The staff run jobs for 
infrequent users but that is a tiny fraction of the tool's usage. We 
have one person in charge of the entire litho section; e-beam writer, 
laser writer, mask aligner and an assortment of support equipment. My 
guess is that about 25% of the time is dedicated to the e-beam writer.

Cheers!

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu

On 3/5/2025 2:24 PM, Brian Baker wrote:
>
> Dear Lab Network,
>
> We are in the process of purchasing our first electron beam 
> lithography (EBL) system, and we are reaching out to understand how 
> different facilities staff and support their EBL tools.
>
> For those of you who have an EBL system, we would appreciate any 
> insights you can share regarding staffing:
>
>   * Do you have a dedicated staff member for EBL operations?
>   * If not, what percentage FTE is typically required to maintain the
>     tool, develop processes, train users, and run jobs?
>   * Any additional insights on challenges or best practices for
>     supporting an EBL system?
>
> Your feedback would be incredibly valuable as we establish a 
> sustainable support model for our system.
>
> Thank you for your time and insights,
>
> Brian Baker
>
> University of Utah Nanofab Cleanroom Manager
>
>
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