[labnetwork] Etching WO3

Beaudoin, Mario beaudoin at physics.ubc.ca
Fri Mar 14 19:14:45 EDT 2025


Dear Network,

I have a big copper sputter target holder on which a WO3 (tungsten 
tri-oxide) target on it.  I'd like to etch away the WO3 and keep the 
copper.  Anyone can recommend some appropriate wet chemistry?

Best

Mario

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