[labnetwork] Etching WO3

[Prashant Srinivasan]

Mario,

Just a guess here: You can try dilute HF, say 3-5 % v/v at room 
temperature. Copper is passivated by the formation of a fluoride.

On 3/14/2025 4:14 PM, Beaudoin, Mario wrote:
>
> Dear Network,
>
> I have a big copper sputter target holder on which a WO3 (tungsten 
> tri-oxide) target on it.  I'd like to etch away the WO3 and keep the 
> copper.  Anyone can recommend some appropriate wet chemistry?
>
> Best
>
> Mario
>
> -- 
>
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-- 
Prashant Srinivasan
Teaching Cleanroom Engineer
Electrical & Computer Engineering
University of California, Santa Barbara
Santa Barbara, California 93106
https://www.ece.ucsb.edu/department-resources/electronics-shop/tcr
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