[labnetwork] Cleanroom dB levels

[N Shane Patrick]

Our facility is bay and chase, no subfab, so all the pumps and chillers and all are right next door to the equipment. After a recent request by one of our staff members, I did an informal survey using NIOSH’s Sound Level Monitor app (NIOSH SLM) and an uncalibrated microphone. The only time I got above 80db was when people were talking or dropped things, even in our loudest chases.

Sustained levels at 85 or more are the levels of concern for hearing loss according to US agencies. Our EHS team agreed with me that even with an uncalibrated system we were very unlikely to reach sustained levels of concern. People are still welcome to use hearing protection for their own comfort, of course, and I’d likely provide it for my staff if asked, but it takes a lot to get to that sustained 85db point.

Now, 80db acoustics and the associated mechanical vibrations from all of that is certainly enough to mess with sensitive instruments, and we have had to relocate certain tools or just accept our environmental noise translates to measurement noise. That’s more a matter of design and space limitations for us than anything else.

-N. Shane Patrick
Manager, Lab Operations and Safety
Washington Nanofabrication Facility


Sent from my iPhone

On Mar 18, 2025, at 5:26 PM, Joseph Losby <joseph.losby at ucalgary.ca> wrote:


Hi everyone,

Have any of you taken acoustic noise measurements of your cleanroom facilities, or have a basis of design for acceptable levels?

If you can share your facility ACH with noise level ( dB ) that would be great.  Any other input will be much appreciated as well.

Cheers,
Joe



Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca


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