[labnetwork] Cleanroom dB levels

[Beall, James A. (Fed)]

Hi Joe,
Our fab is also bay and chase with a 24” raised floor.
Our litho bay is 65-69dB(A) with the Niosh iPhone app.
Our DRIE bay is 71-76, more typical bays are 67-74, worse near wet benches with large exhaust flows.
In the chase with the big dry pumps, it can get up to 80.

Best regards,

Jim
NIST Boulder BMF

________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Joseph Losby <joseph.losby at ucalgary.ca>
Sent: Tuesday, March 18, 2025 3:21:16 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cleanroom dB levels

Hi everyone,

Have any of you taken acoustic noise measurements of your cleanroom facilities, or have a basis of design for acceptable levels?

If you can share your facility ACH with noise level ( dB ) that would be great.  Any other input will be much appreciated as well.

Cheers,
Joe



Joseph Losby, PhD

Manager, qLab Operations

joseph.losby at ucalgary.ca


[cid:594a68b8-052d-4f5d-8b91-7c172c284e10]<https://io.ucalgary.ca/quantum-city>

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