[labnetwork] antimony-doped tin oxide deposition

[Rob Belan]

Hi Russ,

This would need to be sputtered as the vaporization temperatures are too far apart between antimony oxide (300C) and tin oxide (1000C) to yield good results via thermal evaporation.  Also, antimony oxide has a very high vapor pressure and I am sure there would be cross contamination issues down the road if it were sputtered in a general purpose tool.

Rob


Rob Belan
Technical Director PVD Products
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Russ Renzas
Sent: Wednesday, March 19, 2025 5:33 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] antimony-doped tin oxide deposition

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I have a user who wants to deposit antimony-doped tin oxide. Does anyone have experience with this, is it best evaporated or sputtered, do I need to worry about it contaminating a sputterer?

Thanks for any insight,

Russ

Russ Renzas
University of Nevada, Reno
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