[labnetwork] Dry Plasma Etch Cleaning Recipes and Evaluation

[Nadia Pervez]

Hi Emma,

Most of our users run very short processes and Ar/O2 clean before
conditioning. We're in the unfortunate situation of having both F and Cl in
the same tool.

This our mandatory clean after BCl3 processes (after discussion with Craig
Ward at Oxford):

   - step 1: Cl2 clean
      - Cl2: 50 sccm
      - Pressure: 20 mTorr
      - ICP: 1500 W
      - RF: 150 W
      - Temperature: 20C
      - Backside He pressure: 5 Torr
      - Time: 20 min (or the length of the BCl3 process, whichever is
      longer)
   - step 2: O2/SF6 clean
      - O2: 40 sccm
      - SF6: 10 sccm
      - Pressure: 20 mTorr
      - ICP: 1500 W
      - RF: 150 W
      - Temperature: 20C
      - Backside He pressure: 5 Torr
      - Time: 20 min (or the length of the BCl3 process, whichever is
      longer)

The intention of step 1 is to remove BCl3, and step 2 is to remove Cl2.

Thanks,
Nadia

On Mon, Mar 17, 2025 at 8:36 PM Emma Anquillare <eanquillare at gc.cuny.edu>
wrote:

> Dear Labnetwork Hivemind,
>
> I am looking to assemble what we know collectively about dry plasma etch
> cleaning recipes so that I can summarize, compare, and ultimately
> experimentally evaluate them.
>
> I am interested in:
> -Do your facility's etchers (ICP/ RIE) have custom clean recipes specific
> to certain etch recipes or materials? If so, what are they and what are
> both the recipe and clean parameters?
> -Do you use an emission spectrometer (or any other method) to develop or
> evaluate these cleans?
> -How did you come up with these cleans in the first place?
> -Have you seen any good talks, literature, or other resources relevant to
> this subject?
>
>
> Anything you can share is appreciated and (I hope) will be worth your
> efforts to provide, as I am seeking to compile this for public benefit.
>
> Thanks!
> Emma
>
> *_____________________________________________*
> *Emma Anquillare, PhD*
> Research Scientist
> ASRC Nanofabrication Facility
> City University of New York
>
> *Catalyzing Change, Celebrating Gains: *
> *A decade of visionary science for the public good.*
> _______________________________________________
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>


-- 
Nadia Pervez, PhD
Cleanroom Research Scientist
Shared Equipment Authority (SEA)
Rice University
6100 Main St, MS-686
Houston, TX 77005
np65 at rice.edu
Office: SST-017, 713-348-5069
Cell: 805-284-1193
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