[labnetwork] ideas to clean gold sputter target

[Carlos Gramajo]

Hi Fubo,

I might try wet etching, depending on what contaminants you have, but
making sure if doesn't etch Au.

Cheers,

Carlos Gramajo
Cleanroom Research Scientist
Shared Equipment Authority (SEA), Rice University
Cell: 713-470-8115; Office: 713-348-8243; cg70 at rice.edu

On Fri, May 9, 2025, 6:38 PM Fubo Rao <furao at ucsd.edu> wrote:

> Dear Colleagues,
>
> What would you recommend for cleaning this Au sputter target that has been
> partially coated/contaminated with other materials? There are probably a
> few material coatings on the target, before this was found out. Sputtering
> the materials off, or sand blasting will waste a lot of gold. Thanks in
> advance.
>
> [image: image.png]
>
> Thanks,
>
> Fubo Rao, Ph.D.,
> Nano3 Technical Director,
> Qualcomm Institute/Atkinson Hall,
> UC San Diego
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> E-mail: furao at ucsd.edu
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