[labnetwork] ideas to clean gold sputter target

Houpu Li houpuli0 at gmail.com
Fri May 9 22:34:54 EDT 2025


Hi Fubo,
Do you know what materials the coating/contamination are?
I have never run into this, but as someone from chemistry background, I'd
like to say that on the chemistry aspect, gold is a very stable material -
so if you can have a rough idea of what's the contamination material, you
have pretty high chance to be able to find a (combination of) wet chemical
etchant that etch away the surface contamination while don't affect the
gold.
Hope this helps.

Best
Houpu


On Fri, May 9, 2025 at 4:38 PM Fubo Rao <furao at ucsd.edu> wrote:

> Dear Colleagues,
>
> What would you recommend for cleaning this Au sputter target that has been
> partially coated/contaminated with other materials? There are probably a
> few material coatings on the target, before this was found out. Sputtering
> the materials off, or sand blasting will waste a lot of gold. Thanks in
> advance.
>
> [image: image.png]
>
> Thanks,
>
> Fubo Rao, Ph.D.,
> Nano3 Technical Director,
> Qualcomm Institute/Atkinson Hall,
> UC San Diego
> 9500 Gilman Drive #0436
> La Jolla, CA 92093-0436
> Tel. (858)534-4518
> Cell: (858)375-9190
> E-mail: furao at ucsd.edu
> https://nanofab.ucsd.edu/
> About Nano3 <https://nanofab.ucsd.edu/about/>
> [image:
> https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/]
> <https://www.linkedin.com/company/ucsd-nano3-shared-research-facility/>
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--
Houpu Li, Ph.D.
Research and Development Engineer
Lab Manager, AMCaT Laboratory
Department of Materials Science and Engineering
UC Davis College of Engineering
office phone : +1(530)752-0284
email: houli at ucdavis.edu
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