[labnetwork] Raith EBPG 5150+ holder movement issues

[Lapointe, Jean]

Hello Dan,

We had some issues with the clamp on our 5200 and ow have a procedure where we ‘exercise’ the clamp (no holder loaded) on a monthly basis.
The clamp holds the holder in place once on the stage. It is lubricated and the exercise motion makes it move through the full range of motion to make sure it is well lubricated.
Jean



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Dan P. Woodie
Sent: May 26, 2025 8:40 AM
To: labnetwork at mtl.mit.edu
Subject: EXT: [labnetwork] Raith EBPG 5150+ holder movement issues

***Attention*** This email originated from outside of the NRC. ***Attention*** Ce courriel provient de l'extérieur du CNRC.

Lab Network,

We have a Raith EBPG 5150+ that was installed February 2024 that has had reoccurring holder movement issues since shortly after install that we can’t seem to solve. I wanted to check in with other Raith 5150 owners to see if they have similar issues and have found any solutions. Raith has been out to service the holders and stage many times, and just spent three weeks doing the yearly PM and addressing this issue only to have it return two days after they left. Any other EBPG owners seeing similar issues? It manifests itself in “move marker: marker is not present in the search area” errors when loading the holders, or in abnormally large stitching errors if the holder is moving after the write has started.

Thanks for any insight anyone can share.

Dan

Daniel Woodie
Director, Micro/Nanofabrication Center, Princeton Materials Institute
Princeton University
155 Andlinger Center
86 Olden St
Princeton, NJ 08540

(609)258-5922 (office)
(607)227-2993 (cell)
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