[labnetwork] Software for KLA Tencor D-120

Kevin M McPeak kmcpeak at lsu.edu
Mon Nov 17 17:10:38 EST 2025


Dear Colleagues,

The LSU Nanofab has recently inherited a KLA Tencor D-120 profilometer from the DOE. The tool did not come with software.

Please let me or Sergi (CC'd) know if you have a copy of the Tencor D-100/D120 software and are willing to share. Thank you!

Regards,
Kevin

--
Kevin M. McPeak
Associate Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication


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