[labnetwork] Issue Striking Plasma for NiFe Sputtering on Angstrom Nexdep PVD System – Need Guidance

[Jing Guo]

Hi Pial, 

Usually for magnetic target, it cannot be a thick one (typically 1-3mm). Otherwise the magnetic field is shunting which will result in plasma strike failure. When I install the magnetic target on AJA tool, there is no bonding Cu backing plate, the Fe or Ni target will be installed directly onto the sputter gun. I think your target thickness is fine, but the backing plate is a problem. You should check with Angstrom sputter engineers about their system setup. 
 Another concern is the striking pressure, usually I use a high pressure to strike (20-30mTorr), then reduce the pressure to 3-5mTorr for deposition. 

I feel the bonded target thickness is the biggest problem. 



Best,
Jing 

---------------------------------------
Jing Guo Ph.D.
Cleanroom Manager/Research Scientist
SEA Cleanroom (SST 017)
Rice University
Houston, TX 
jeanne.guo at rice.edu
713-348-8227

> On Oct 13, 2025, at 3:32 PM, Mohammad Mohtasim Hamid Pial <mpial001 at fiu.edu> wrote:
> 
> Dear All,
> 
> I am attempting to deposit NiFe using a magnetron sputtering setup (Angstrom Engineering – Nexdep PVD platform). Below are my target specifications and sputtering parameters:
> 
> Target: NiFe (2" dia × 1 mm, 4N purity) bonded to a 1/8" Cu backing plate
> Sputtering Method: DC Magnetron Sputtering
> DC Power: 100–150 W
> Base Pressure: ~10⁻⁶ Torr
> Ar Gas Flow Rate: 20–30 sccm
> Working Pressure: 3–5 mTorr
> 
> However, I am unable to ignite the plasma. The DC power supply setpoint keeps blinking and the power stalls around 15 W before dropping 
> 
> Could this issue be due to insufficient magnetic field strength (not penetrating the thick target/Cu backing), or is the target too thick for effective plasma ignition? Do I need a thinner target or additional magnetic confinement?
> 
> I would greatly appreciate any insights or recommendations from anyone who has sputtered NiFe or similar high-permeability alloys on this platform.
> 
> Thank you in advance!
> Pial
> 
> 
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