[labnetwork] UPS for high-vac tools

[Dennis Schweiger]

Hossein,

All of our critical tools (Stepper, MBE, e-beam, freezers) are on some form
of a Schneider/APC 3-phase UPS system, sized for the current load, and to
provide about 15-20 minutes of run time in the event of a power failure.
For the tools within the LNF, they are backed by a 50KW (L50-208-BP-ST) unit
that also supports all of our gas detection and notification systems.  For
the tools (MBE) around and outside of the LNF proper, we have smaller
dedicated UPS (LSU-GVS-25KW-4B-NST) units supporting these.  All of the UPS
units are supported through our plant department (semi-annual inspections),
and we test every one monthly.

Also, the 50KW unit mentioned above is on our genset system (building
emergency power), so a true power outage for that unit should only ever be
10-20 seconds, just the time it takes to spin up the generators.

Thanks,

Dennis Schweiger
University of Michigan/LNF
Facilities

734.647.2055 Ofc


On Mon, Oct 20, 2025 at 5:44 PM Alizadeh, Hossein <halizade at bu.edu> wrote:

> Hi everyone,
> We recently experienced a power outage that caused damage to several of
> our high-vac systems. We’re now considering installing UPS units for some
> of our more sensitive tools (etchers, SEMs, TEM) One key question is
> whether to use double-conversion UPS systems or opt for less expensive
> alternatives.
> If you have experience using UPS systems with these types of instruments,
> I’d appreciate any recommendations, guidance, or brand suggestions you’ve
> found reliable. Your input would be helpful as we evaluate the best option
> for our needs.
> Best,
> Hossein
>
> ---------------------------------------------
> Hossein Alizadeh, PhD.
> Technical Director,
> Photonics Center, Boston University
> halizade at bu.edu
> 617-353-0632
>
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