[labnetwork] UPS for high-vac tools

[Alizadeh, Hossein]

Hi everyone,
We recently experienced a power outage that caused damage to several of our high-vac systems. We’re now considering installing UPS units for some of our more sensitive tools (etchers, SEMs, TEM) One key question is whether to use double-conversion UPS systems or opt for less expensive alternatives.
If you have experience using UPS systems with these types of instruments, I’d appreciate any recommendations, guidance, or brand suggestions you’ve found reliable. Your input would be helpful as we evaluate the best option for our needs.
Best,
Hossein

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Hossein Alizadeh, PhD.
Technical Director,
Photonics Center, Boston University
halizade at bu.edu
617-353-0632

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