[labnetwork] UPS for high-vac tools

[Nicholas Menounos]

Hi Hossein,

For reference at MIT:


  *   MIT has a new microgrid/cogen plant that can produce >80% of campus loads = our historical utility power quality and reliability is very good.
  *   None of our fab tools (e.g. PVD, CVD, etch) have standby power sources except for tube furnace controllers.
  *   Almost all our high value characterization/metrology equipment (TXRF, SEM's, TEM's, AFM's etc) has its own local UPS.
  *   If we specify the equipment, it's always double conversion. If you are going to add complexity and in series failure mode to the power distribution, protecting power quality is a big benefit.
  *   Some of the newer EM systems (Thermo specifically) require an isolation transformer (internal to UPS or external) to eliminate the potential choppiness of electronic conversion and provide galvanic separation.
  *   We unfortunately have more than a half dozen manufacturers (e.g. Toshiba, GE, Schinder, APC, Xtreme, Pheonix, etc)...if serviced and monitored, they have all been relatively reliable. But maintenance and oversight are not trivial if you expect them to work when you need them.

Best,
Nick Menounos, PE
MIT.nano - Associate Director of Infrastructure
Cell: (508) 932-0938<tel:+15089320938>

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Alizadeh, Hossein
Sent: Monday, October 20, 2025 11:57 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] UPS for high-vac tools

Hi everyone,
We recently experienced a power outage that caused damage to several of our high-vac systems. We're now considering installing UPS units for some of our more sensitive tools (etchers, SEMs, TEM) One key question is whether to use double-conversion UPS systems or opt for less expensive alternatives.
If you have experience using UPS systems with these types of instruments, I'd appreciate any recommendations, guidance, or brand suggestions you've found reliable. Your input would be helpful as we evaluate the best option for our needs.
Best,
Hossein

---------------------------------------------
Hossein Alizadeh, PhD.
Technical Director,
Photonics Center, Boston University
halizade at bu.edu<mailto:halizade at bu.edu>
617-353-0632

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