[labnetwork] UPS for high-vac tools

[Kyle Keenan]

Hi Hossein,

Very briefly, I can tell you that we have one for our Raith EBPG5200+, and
it was quite costly at >$40k, not including installation costs, so that may
be a consideration.

Best,
Kyle

On Mon, Oct 20, 2025 at 5:41 PM Alizadeh, Hossein <halizade at bu.edu> wrote:

> Hi everyone,
> We recently experienced a power outage that caused damage to several of
> our high-vac systems. We’re now considering installing UPS units for some
> of our more sensitive tools (etchers, SEMs, TEM) One key question is
> whether to use double-conversion UPS systems or opt for less expensive
> alternatives.
> If you have experience using UPS systems with these types of instruments,
> I’d appreciate any recommendations, guidance, or brand suggestions you’ve
> found reliable. Your input would be helpful as we evaluate the best option
> for our needs.
> Best,
> Hossein
>
> ---------------------------------------------
> Hossein Alizadeh, PhD.
> Technical Director,
> Photonics Center, Boston University
> halizade at bu.edu
> 617-353-0632
>
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-- 
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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