[labnetwork] Experience with Angstrom E-Beam Evaporators?
Christopher Alpha
alpha at cnf.cornell.edu
Tue Oct 21 10:27:51 EDT 2025
Hi Gabe,
We have a lot of AJA hardware that has been pretty good to us over the
years (various sputter/an ion mill/etc), and a few Angstrom evaporators
- we really like the Angstrom UHV loadlock system that we have.
Primarily we are using this for Ohmic contact metals, fast cycle time,
nice software, good company support. We also have a Quantum tool from
them that is doing some nice JJ work. I want to point you towards Aaron
Windsor here who manages these tools and has run our evaporators for
years - his insights hopefully might be useful for you, adding him to
this reply. I am not sure about throwing the oxides into the mix on a
brand new tool, I would think about punting that towards older tooling
and segregating if possible.
Best,
C
On 10/20/25 13:57, Gabriel Catalano wrote:
> Hello All,
>
> We are in the process of procuring a new E-Beam evaporator and
> considering options from Kurt J. Lesker, AJA Internation, and Angstrom
> Engineering; the pricing between all three vendors is comparable. We
> have lots experience using and maintaining KJL and AJA systems, but do
> not have much exposure to Angstrom Engineering's systems. We are
> curious for other nanolabs experience with these tools, particularly
> from a maintenance prospective. We plan to use this tool for both
> metal and oxide depositions. Any feedback or thoughts on Angstrom's
> E-beam systems is very much appreciated!
>
> Kind Regards,
> ------------------------
> *Gabe Catalano*
> Lab Operations
> Stanford Nanofabrication Facility (SNF)
> (650) 498-4014
> https://snf.stanford.edu/ <https://snf.stanford.edu/>
>
>
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--
Christopher Alpha
User Program Manager
Cornell Nanoscale Facility
Cornell University
250 Duffield Hall
343 Campus Rd
Ithaca, NY 14853
tel (607)254-4913
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