[labnetwork] Experience with Angstrom E-Beam Evaporators?

[Johnson, Michael W]

We have an Angstrom E beam tool, Nextdep Tall, 6 pocket Telemark source. Had it for about 9 years. Technical support is excellent. Process support is strong as well.
Our current one is turbo pumped with no load lock. We are soon to buy another one from them just for metals and we intend to get a load lock on that one to reduce pump down time. Great company.
I would very strongly recommend them.

We do have an AJA orion sputterer and one of their ion millers. Very good support there as well.

-Michael.
Tulane TINI
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Gabriel Catalano <gcatalano at stanford.edu>
Sent: Monday, October 20, 2025 12:57 PM
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Subject: [labnetwork] Experience with Angstrom E-Beam Evaporators?


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Hello All,

We are in the process of procuring a new E-Beam evaporator and considering options from Kurt J. Lesker, AJA Internation, and Angstrom Engineering; the pricing between all three vendors is comparable. We have lots experience using and maintaining KJL and AJA systems, but do not have much exposure to Angstrom Engineering's systems. We are curious for other nanolabs experience with these tools, particularly from a maintenance prospective. We plan to use this tool for both metal and oxide depositions. Any feedback or thoughts on Angstrom's E-beam systems is very much appreciated!

Kind Regards,
------------------------
Gabe Catalano
Lab Operations
Stanford Nanofabrication Facility (SNF)
(650) 498-4014
https://snf.stanford.edu/

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