[labnetwork] UPS for high-vac tools

[Iulian Codreanu]

Hi Hossein,

I have my e-beam writer and the SEM on UPSes. The UPSes are fed from a 
power panel that is backed by the building's emergency generators.

The one on the SEM is a 8 kVA PowerVar.

The one on the e-beam writer is a 20 KVA Liebert NX.

They've been in operation for about 10 years and proven reliable.

I have them serviced once a year.

Cheers,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
https://udnf.udel.edu


On 10/20/2025 11:56 AM, Alizadeh, Hossein wrote:
> Hi everyone,
> We recently experienced a power outage that caused damage to several 
> of our high-vac systems. We’re now considering installing UPS units 
> for some of our more sensitive tools (etchers, SEMs, TEM) One key 
> question is whether to use double-conversion UPS systems or opt for 
> less expensive alternatives.
> If you have experience using UPS systems with these types of 
> instruments, I’d appreciate any recommendations, guidance, or brand 
> suggestions you’ve found reliable. Your input would be helpful as we 
> evaluate the best option for our needs.
> Best,
> Hossein
>
> ---------------------------------------------
> Hossein Alizadeh, PhD.
> Technical Director,
> Photonics Center, Boston University
> halizade at bu.edu
> 617-353-0632
>
>
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