[labnetwork] Sputtering of pure copper

[Dan P. Woodie]

Lab Network Experts,

Anyone here doing sputtering of pure copper and can offer any advice concerning tool issues associated with doing that? We already have evaporated copper used in a variety of processes, so we are not worried about transistor contamination concerns, but more related to tool issues such as impacts on other films in the same tool or vacuum issues. Any thoughts the community can share would be appreciated. Thank you.

Dan

Daniel Woodie
Director, Micro/Nanofabrication Center, Princeton Materials Institute
Princeton University
155 Andlinger Center
86 Olden St
Princeton, NJ 08540

(609)258-5922 (office)
(607)227-2993 (cell)
daniel.woodie at princeton.edu<mailto:daniel.woodie at princeton.edu>
mnfc.princeton.edu<https://mnfc.princeton.edu/>
www.linkedin.com/in/danielpwoodie<http://www.linkedin.com/in/danielpwoodie/>




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20250926/d23e8fb2/attachment.html>