[labnetwork] [EXTERNAL] Re: wet bench EMO's

[Beall, James A. (Assoc)]

Same at NIST Bouler with our JST benches.

Jim Beall
NIST Associate (BMF)
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Matthew Moneck <mmoneck at andrew.cmu.edu>
Sent: Wednesday, April 8, 2026 2:04:55 PM
To: Kyle Keenan <kckeenan at seas.upenn.edu>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [EXTERNAL] Re: [labnetwork] wet bench EMO's

Hi Kyle,

Our wet decks (manufactured by JST) only shut off 208V and 120V power to the units.  DI, N2, and CDA feeds remain active, which means DI and N2 spray guns remain active, as well as purges for the electronics enclosures, spinners, etc.  We also have CO2 fire suppression systems on all decks with flammable solvents.  Those systems are powered by a separate panel connected to building emergency power and will also remain active after activation of the EMO button on the wet deck.

Best Regards,

Matt

On Tue, Apr 7, 2026 at 4:11 PM Kyle Keenan <kckeenan at seas.upenn.edu<mailto:kckeenan at seas.upenn.edu>> wrote:
Hello All,

I'm curious to know what the EMO's do on the wet benches in your facilities. Do they shut down CDA, N2 or water, or just high voltage? What is the thought process behind what does/does not get shut down? We recently had a bad DI water leak on one of our benches, and we were a little surprised to find out that the EMO did not shut off the water supply, so we are considering whether or not we want to make a changes to the way the EMO's work on our benches.

I look forward to reading your replies.

Best,
--
Kyle Keenan

Senior Manager - Laboratory Operations
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925

[https://lh7-rt.googleusercontent.com/docsz/AD_4nXe66pb_bj7n0vXky5r9uEf3y5sMz4yFV2HK-lOuGGMzj3VS6ybtG41AGZcUidgjZH61GUaGnR38EWIiqL3J-TsS9TxolLE--_h8K79Lk-dgYMHSjcBvHUy-zL7bWnKmfmJklE7i?key=OpK1PovMbdplDTzml6yQgugX]
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--

--
Matthew T. Moneck, Ph.D
Executive Director, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone: 412-268-5430
ece.cmu.edu<http://ece.cmu.edu/>
nanofab.ece.cmu.edu<http://nanofab.ece.cmu.edu/>
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