[labnetwork] high v.p. liquid delivery to etch system?

[Russ Renzas]

Hi everybody, we're trying to do etch experiments with CH3I, which has a vapor pressure of 400 torr at room temperature.

We can buy it as a liquid in a glass bottle from Sigma, but it'd be better to have it in a vapor draw canister or something with less potential for release/exposure. Has anyone ever had a similar situation? How did you get the chemistry into a usable container? I'd happily pay more for a company to do it for us...

Also, what's a useful quantity for typical use (few months of experiments)? It's readily available in quantities from 10 mL to 5 kg! We were thinking like 500 mL, but I've really not dealt with this sort of situation previously, maybe way off.

Thanks for any advice!

Russ

Russ Renzas, Ph.D.
Director, Davidson Foundation Cleanroom, College of Engineering
Research Associate Professor, Electrical Engineering
University of Nevada, Reno
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