[labnetwork] Current source for HSQ (FOx-16 / XR-1541)?

[Amir Safavi-Naeini]

Hi everyone,

We use HSQ as our high-resolution negative e-beam resist at Stanford,
mostly for nanophotonic and quantum devices in lithium niobate and silicon.
We've been trying to restock and have not been able to find a current
source.

Two questions:

1. Where are people buying HSQ these days? FOx-16, FOx-25, XR-1541, or any
equivalent formulation. A vendor name and a contact would be enormously
helpful. We only need a liter or two every year or two, so we are not a
large-volume customer and that may be part of the problem.

2. If the supply situation is genuinely dead, what are people using instead
for high-resolution negative-tone work, and what did you give up in
switching?

For what it's worth, we store ours in LN2, so shelf life isn't our limiting
factor we believe...

Happy to summarize replies back to the list if there's interest.

Thanks,
Amir

-- 
Amir H. Safavi-Naeini
Associate Professor
Department of Applied Physics
Ginzton Laboratory, Stanford University

mail address:
Edward L. Ginzton Laboratory
348 Via Pueblo Mall, Box 336
Stanford University
Stanford, CA  94305-4088

office phone: +1 650 498 7496  [Room 309, Spilker]
mobile phone: +1 626 379 3702
zoom: https://stanford.zoom.us/j/4970959839
http://www.stanford.edu/~safavi/
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