[labnetwork] Current source for HSQ (FOx-16 / XR-1541)?

[N Shane Patrick]

Seconded. Pretty much everyone I know has moved to dischem for EBL purposes.

-Shane
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On Aug 11, 2026, at 5:34 PM, Price, Aimee <price.798 at osu.edu> wrote:


Hi Amir, We get ours from Dischem (2%, 4%, 16%, and 20%). They call it HSiQ. The contact is Andy Thompson, andy@ dischem. com. They are in Pittsburgh and mix it on order, but the resin comes from Canada so there is sometimes a tariff fee. He’ll
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Hi Amir,
We get ours from Dischem (2%, 4%, 16%, and 20%). They call it HSiQ.

The contact is Andy Thompson, andy at dischem.com. They are in Pittsburgh and mix it on order, but the resin comes from Canada so there is sometimes a tariff fee. He’ll make small quantities so you don’t have to order a liter each time.

Aimee
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Amir Safavi-Naeini <safavi at stanford.edu>
Sent: Tuesday, August 11, 2026 5:01 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Cc: Taewon Park <twpark at stanford.edu>
Subject: [labnetwork] Current source for HSQ (FOx-16 / XR-1541)?

Hi everyone, We use HSQ as our high-resolution negative e-beam resist at Stanford, mostly for nanophotonic and quantum devices in lithium niobate and silicon. We've been trying to restock and have not been able to find a current source. 
Hi everyone,

We use HSQ as our high-resolution negative e-beam resist at Stanford, mostly for nanophotonic and quantum devices in lithium niobate and silicon. We've been trying to restock and have not been able to find a current source.

Two questions:

1. Where are people buying HSQ these days? FOx-16, FOx-25, XR-1541, or any equivalent formulation. A vendor name and a contact would be enormously helpful. We only need a liter or two every year or two, so we are not a large-volume customer and that may be part of the problem.

2. If the supply situation is genuinely dead, what are people using instead for high-resolution negative-tone work, and what did you give up in switching?

For what it's worth, we store ours in LN2, so shelf life isn't our limiting factor we believe...

Happy to summarize replies back to the list if there's interest.

Thanks,
Amir

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Amir H. Safavi-Naeini
Associate Professor
Department of Applied Physics
Ginzton Laboratory, Stanford University

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