[labnetwork] Looking for Etch Tool for Australia National University spin off

[Abbie Gregg]

Hi Labnetwork,
I am working with an Australia National University spin off that is looking to add a University scale  RIE/ICP tool to their new location in Sydney Australia (commute too far from Canberra) within the next 4 months. New tools seem to have longer lead time at the moment.  I’ve done a lot of Cleanroom Design work with many Labnetwork members over the years,  but don’t know where they could  possibly purchase a mothballed, excess, or repairable tool, or if anyone out there  has a new tool slot that they can’t receive timely….and would trade for a later order slot….
Have you been seeing etch tool lead times out beyond 6 months?
Here is a list of the capabilities needed…..
•           Wafer Size Capability: up to 200 mm
•           Trench profile: 88–90° sidewall
•           Sidewall roughness: <10nm
•           CD capability: ≤2µm trench width
•           Etch depth: ≥10µm at 1:10 aspect ratio
•           Material compatibility: Si, SiO₂, SiNx, Ti (CF₄/CHF₃ + O₂ chemistry), Al and Cr hard mask
•           Process flexibility: Support Bosch, Cryo and ICP-RIE processes
•           Etch uniformity: ≤5% across 200mm wafer
•           In-situ End Point Detection required
•           Loading Type: Single wafer manual mode is sufficient, automated batch will be bonus at this stage

Benchmark platforms include:
1.          Oxford PlasmaPro 100 Cobra
2.         ULVAC NLD-570
3.         SENTECH SI 500C
4.         SAMCO RIE-800iPB

Any recommendations (for these or other tools and sources)  are welcome…..and greatly appreciated. This purchase is well funded.
Best Regards,
Abbie Gregg
Chief Technology Officer
Cell: (480) 577-5083
Email: agregg at amts.com<mailto:agregg at amts.com>
AM Technical Solutions,  1501 West Fountainhead Parkway, Suite 130 ,Tempe, AZ 85282

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