[labnetwork] Plasma etcher chamber cleaning

[Philippe Mérel]

Hello LabNetwork,

We have a few plasma etchers in our university cleanroom. In the chambers, we have alumina and Al parts to clean.

How often do you clean your chambers?
What indicator tells you it is time to clean?
What method do you use (plasma cleaning, mechanical, chemical...)?

Thank you.



Philippe Mérel PhD

Coordonnateur Laboratoire de Nanofabrication et de Nanocaractérisation (LNN)

Institut Interdisciplinaire d’Innovation Technologique – 3iT

Université de Sherbrooke

https://www.usherbrooke.ca/3it/

[cid:6d209adb-c52d-463f-8c27-055c0d5a2295]

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