[labnetwork] Nitrogen Generator for Cleanroom Operations

[Alizadeh, Hossein]

Dear Lab Network,
We are looking into switching our cleanroom nitrogen supply from liquid dewars to on-site nitrogen generators. We don't have the option to install a bulk tank, and the logistics of swapping dewars, plus the risk of running out during sensitive etch processes, are becoming a problem.
Do you have any experience using N2 generators for cleanroom applications?
I’d appreciate any insights you have on the operational load compared to dewars. More specifically:

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Have you had issues with purity stability?
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Is the upkeep on the N2 generator and the feed air compressors manageable?
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Are there any specific manufacturers you recommend (or would avoid)?

Warm Regards,
Hossein

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Hossein Alizadeh, PhD.
Technical Director,
Photonics Center, Boston University
halizade at bu.edu
617-353-0632

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