[labnetwork] Nitrogen Generator for Cleanroom Operations

[Collins, Deon]

HMNTL installed a PSA system in 2024. The only purity issues we’ve experienced occurred during periods with significant system leaks, where the PSA struggled to keep up with demand. From our experience, proper system sizing is critical. Oversizing the PSA and providing an adequately sized storage reservoir are both important. Under sizing either component will force the PSA to chase volume and can reduce purity.
Our PSA has been low maintenance. The only notable service item has been a scheduled replacement of the activated carbon at roughly 8,000 hours. There are also two small pneumatic air filters that require periodic change, though these are brief tasks at approximately 2,000-hour intervals.
Prior to this installation, we operated a DB-10 PSA solely for abatement purge gas. It ran flawlessly for approximately ten years before being reintegrated into our main system.
I’ve included manuals for both PSA units in use at HMNTL. The Holtec system has been robust, reliable, and straightforward to maintain. It should be noted that these systems are large and require supporting equipment, including an oil-less air compressor and a dehumidifier. In many cases, the supporting equipment represents as much of an investment as the PSA itself.
Despite these infrastructure requirements and given our prior liquid nitrogen consumption the system provided a rapid financial return. For facilities consuming significant quantities of LN₂, transitioning to a PSA is a no brainer if you are looking for a ROI.

Deon D. Collins


Director of Facilities
The Grainger College Of Engineering UIUC
Holonyak Micro & Nanotechnology Lab
208 N Wright St Rm. 1114 | MC-249
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Alizadeh, Hossein
Sent: Thursday, January 8, 2026 1:43 PM
To: Network Fab <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Nitrogen Generator for Cleanroom Operations

Dear Lab Network,
We are looking into switching our cleanroom nitrogen supply from liquid dewars to on-site nitrogen generators. We don't have the option to install a bulk tank, and the logistics of swapping dewars, plus the risk of running out during sensitive etch processes, are becoming a problem.
Do you have any experience using N2 generators for cleanroom applications?
I’d appreciate any insights you have on the operational load compared to dewars. More specifically:

  *   Have you had issues with purity stability?

  *   Is the upkeep on the N2 generator and the feed air compressors manageable?

  *   Are there any specific manufacturers you recommend (or would avoid)?
Warm Regards,
Hossein

---------------------------------------------
Hossein Alizadeh, PhD.
Technical Director,
Photonics Center, Boston University
halizade at bu.edu<mailto:halizade at bu.edu>
617-353-0632

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