[labnetwork] Recommendation for HF vapor etcher system?

[Demis D. John]

We have an SPTS - very few issues and works well as far as I know.
https://wiki.nanofab.ucsb.edu/wiki/Vapor_HF_Etch
One user had a particulate issue with it, which they eventually fixed by
placing a “cover” wafers on stand-offs over their product wafers, which
“catches” the particles.

I don’t know how it compares with the others you mentioned.

-- Demis (contact info <https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>)
*Reminder*: The NanoFab has a publications policy
<https://wiki.nanotech.ucsb.edu/wiki/Frequently_Asked_Questions#Publications_acknowledging_the_Nanofab>


On Fri, Jan 23, 2026 at 05:56 Beaudoin, Mario <beaudoin at physics.ubc.ca>
wrote:

> Dear Network,
>
> We are looking into purchasing an HF vapor etching system.  We've looked
> at Memstar, AMMT and idonus systems.  We would be grateful for any
> recommendation/appreciation.
>
> For something you may not wish to share with the entire network, I would
> very much appreciate a private message.
>
> Regards,
>
> Mario
> --
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