[labnetwork] removing nitride from stainless steel components

[Andrei Alamariu]

I suggest to buy a new throttle valve. While the acids will do the cleaning, the connecting 
 vacuum flanges surface will get roughened. The main vacuum gate and the throttle valve must be covered
by a heating jacket. ( same for the DCS incoming SS pipe)
Sent from iPad
> On Jul 2, 2026, at 6:00 PM, Kyle Keenan <kckeenan at engineering.upenn.edu> wrote:
> 
> 
> Hello All,
> 
> We are in the process of rebuilding our LPCVD nitride tube furnace, and could use some advice on the best way to remove deposited nitride film the our throttle valve and vacuum flange, both of which are made of stainless steel. Physical cleaning does not work very well, and the only stuff I can find on-line mentions hot phosphoric or some type of BOE etching which I'm afraid will eat or at least tarnish the metal. We found out the hard way that the throttle valve was stuck closed because the buildup, so having a good cleaning procedure is a necessity.
> 
> I look forward to reading your replies.
> 
> Kyle
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