[labnetwork] removing nitride from stainless steel components

[Kyle Keenan]

Hello All,

We are in the process of rebuilding our LPCVD nitride tube furnace, and
could use some advice on the best way to remove deposited nitride film the
our throttle valve and vacuum flange, both of which are made of stainless
steel. Physical cleaning does not work very well, and the only stuff I can
find on-line mentions hot phosphoric or some type of BOE etching which I'm
afraid will eat or at least tarnish the metal. We found out the hard way
that the throttle valve was stuck closed because the buildup, so having a
good cleaning procedure is a necessity.

I look forward to reading your replies.

Kyle
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20260702/653bb7b4/attachment.html>