[labnetwork] Backside Alignment Microscopes

[Jeff McKay]

@Kyle - Thanks for suggestion, but we are looking into more benchtop
microscope tools

@Demis - For MA6 verification we have installed a halogen bulb on the
bottomside and IR camera installed on topside for verification alignment.
It is crude and built into the MA6 system and we are not able to pull
images directly from it (cell phone images of the monitor....), we do use
splitview and backside/frontside objectives during exposure though.

@Owain - Thanks, we have contacted our Nikon vendor and have encountered
some slowness in getting the ball rolling.... Are you able to share any
specific model#s for IR cameras and lamps that are attached to your scope?

Thank you all,
Jeff


On Fri, Jul 3, 2026 at 9:31 AM Owain Clark <odc1n08 at soton.ac.uk> wrote:

> Hi Jeff, we have been having some success with Nikon microscopes and
> automated stages (Marzhauser) then scripting NIS-Elements to acquire data.
> I expect automated data extraction would be possible from line slice
> intensity plots. Currently the users have managed to develop automated die
> grid inspection macros based on some example macros given by Nikon, anyone
> with a basic level of coding can get stuck in, API is C style syntax. I
> just made sure I had bullet proof hardware interlocks to prevent lens
> collisions in place first as it turned out joystick control of Z bypasses
> software soft limits, obvious in hindsight as it talks direct to motor
> controller.
>
>
>
> Another nice part of the s/w is that the image stitching (mosaics) works
> quite well, so if you need high dpi resolution on larger images it’s an
> easy way – all callable from macros also. Or put a DS10 camera on and enjoy
> up to 24MP images per FoV.
>
>
>
> I’m quite happy with this system, people are using it increasingly for
> automated in line quality steps throughout processing, our enterprise teams
> like it for the customers that demand quality inspections of every step.
>
>
>
> O.
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Jeff
> McKay
> *Sent:* 02 July 2026 22:17
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Backside Alignment Microscopes
>
>
>
> You don't often get email from jeffmckay at g.ucla.edu. Learn why this is
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> *CAUTION:* This e-mail originated outside the University of Southampton.
>
> Hello All,
>
>
>
> We currently use Karl Suss MA6 for lithography on the backside of 4" InP
> wafers. It is critical that we have good back to front side alignment, and
> right now we can only use the MA6 to verify alignment.
>
>
>
> Unfortunately there is no scale/camera options for outputting to get
> quantative data from our alignment.
>
>
>
> We are looking for a bench top tool/microscope that would allow us to
> check alignment after development so that we are getting higher resolution
> and more quantative results. Does anyone have any recommendations?
>
>
>
> Thanks,
>
> Jeff McKay
>
>
>
> Process Engineer
>
> Global Communications Semiconductor
>
> Torrance, CA
>
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